11/2/2012	10:07:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/2/2012	10:07:05 AM	Recipe started at 10:07 AM
11/2/2012	10:07:05 AM	Helium valve closed
11/2/2012	10:07:05 AM	H2 valve closed
11/2/2012	10:07:05 AM	BCl3 valve closed
11/2/2012	10:07:05 AM	PH3 valve closed
11/2/2012	10:07:05 AM	SiCl4 pre valve closed
11/2/2012	10:07:05 AM	SiCl4 post valve closed
11/2/2012	10:07:05 AM	Main Vac valve closed
11/2/2012	10:07:05 AM	Bypass valve closed
11/2/2012	10:07:05 AM	Bubbler valve closed
11/2/2012	10:07:05 AM	Helium MFC set to  0.000000
11/2/2012	10:07:05 AM	H2 MFC set to  0.000000
11/2/2012	10:07:05 AM	BCl3 MFC set to  0.000000
11/2/2012	10:07:05 AM	PH3 MFC set to  0.000000
11/2/2012	10:07:05 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:07:05 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:07:05 AM	Tube furnace set to 0
11/2/2012	10:07:08 AM	H2 valve closed
11/2/2012	10:07:08 AM	BCl3 valve closed
11/2/2012	10:07:08 AM	PH3 valve closed
11/2/2012	10:07:08 AM	SiCl4 pre valve closed
11/2/2012	10:07:08 AM	SiCl4 post valve closed
11/2/2012	10:07:08 AM	Main Vac valve closed
11/2/2012	10:07:08 AM	Bypass valve closed
11/2/2012	10:07:08 AM	Bubbler valve closed
11/2/2012	10:07:08 AM	Helium valve opened
11/2/2012	10:07:08 AM	Helium MFC set to  500.000000
11/2/2012	10:07:08 AM	H2 MFC set to  0.000000
11/2/2012	10:07:08 AM	BCl3 MFC set to  0.000000
11/2/2012	10:07:08 AM	PH3 MFC set to  0.000000
11/2/2012	10:07:08 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:07:08 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:07:08 AM	Tube furnace set to 0
11/2/2012	10:08:21 AM	Helium valve closed
11/2/2012	10:08:21 AM	H2 valve closed
11/2/2012	10:08:21 AM	BCl3 valve closed
11/2/2012	10:08:21 AM	PH3 valve closed
11/2/2012	10:08:21 AM	SiCl4 pre valve closed
11/2/2012	10:08:21 AM	SiCl4 post valve closed
11/2/2012	10:08:21 AM	Main Vac valve closed
11/2/2012	10:08:21 AM	Bypass valve closed
11/2/2012	10:08:21 AM	Bubbler valve closed
11/2/2012	10:08:21 AM	Helium MFC set to  0.000000
11/2/2012	10:08:21 AM	H2 MFC set to  0.000000
11/2/2012	10:08:21 AM	BCl3 MFC set to  0.000000
11/2/2012	10:08:21 AM	PH3 MFC set to  0.000000
11/2/2012	10:08:21 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:08:21 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:08:21 AM	Tube furnace set to 0
11/2/2012	10:08:22 AM	Run finished at 10:08 AM
11/2/2012	10:08:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/2/2012	10:23:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/2/2012	10:23:05 AM	Recipe started at 10:23 AM
11/2/2012	10:23:05 AM	Helium valve closed
11/2/2012	10:23:05 AM	H2 valve closed
11/2/2012	10:23:05 AM	BCl3 valve closed
11/2/2012	10:23:05 AM	PH3 valve closed
11/2/2012	10:23:05 AM	SiCl4 pre valve closed
11/2/2012	10:23:05 AM	SiCl4 post valve closed
11/2/2012	10:23:05 AM	Main Vac valve closed
11/2/2012	10:23:05 AM	Bypass valve closed
11/2/2012	10:23:05 AM	Bubbler valve closed
11/2/2012	10:23:05 AM	Helium MFC set to  0.000000
11/2/2012	10:23:05 AM	H2 MFC set to  0.000000
11/2/2012	10:23:05 AM	BCl3 MFC set to  0.000000
11/2/2012	10:23:05 AM	PH3 MFC set to  0.000000
11/2/2012	10:23:05 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:23:05 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:23:06 AM	Tube furnace set to 0
11/2/2012	10:23:06 AM	Run finished at 10:23 AM
11/2/2012	10:23:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/2/2012	10:33:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2012	10:33:57 AM	Recipe started at 10:33 AM
11/2/2012	10:33:57 AM	Helium valve closed
11/2/2012	10:33:57 AM	H2 valve closed
11/2/2012	10:33:57 AM	BCl3 valve closed
11/2/2012	10:33:57 AM	PH3 valve closed
11/2/2012	10:33:57 AM	SiCl4 pre valve closed
11/2/2012	10:33:57 AM	SiCl4 post valve closed
11/2/2012	10:33:57 AM	Main Vac valve closed
11/2/2012	10:33:57 AM	Bubbler valve closed
11/2/2012	10:33:57 AM	Bypass valve opened
11/2/2012	10:33:57 AM	Helium MFC set to  0.000000
11/2/2012	10:33:57 AM	H2 MFC set to  0.000000
11/2/2012	10:33:57 AM	BCl3 MFC set to  0.000000
11/2/2012	10:33:57 AM	PH3 MFC set to  0.000000
11/2/2012	10:33:57 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:33:57 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:33:57 AM	Tube furnace set to 0
11/2/2012	10:35:26 AM	Helium valve closed
11/2/2012	10:35:26 AM	H2 valve closed
11/2/2012	10:35:26 AM	BCl3 valve closed
11/2/2012	10:35:26 AM	PH3 valve closed
11/2/2012	10:35:26 AM	SiCl4 pre valve closed
11/2/2012	10:35:26 AM	SiCl4 post valve closed
11/2/2012	10:35:26 AM	Main Vac valve closed
11/2/2012	10:35:26 AM	Bubbler valve closed
11/2/2012	10:35:26 AM	Bypass valve opened
11/2/2012	10:35:26 AM	Helium MFC set to  0.000000
11/2/2012	10:35:26 AM	H2 MFC set to  0.000000
11/2/2012	10:35:26 AM	BCl3 MFC set to  0.000000
11/2/2012	10:35:26 AM	PH3 MFC set to  0.000000
11/2/2012	10:35:26 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:35:26 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:35:27 AM	Tube furnace set to 0
11/2/2012	10:36:27 AM	Helium valve closed
11/2/2012	10:36:27 AM	H2 valve closed
11/2/2012	10:36:27 AM	BCl3 valve closed
11/2/2012	10:36:27 AM	PH3 valve closed
11/2/2012	10:36:27 AM	SiCl4 pre valve closed
11/2/2012	10:36:27 AM	SiCl4 post valve closed
11/2/2012	10:36:27 AM	Bypass valve closed
11/2/2012	10:36:27 AM	Bubbler valve closed
11/2/2012	10:36:27 AM	Main Vac valve opened
11/2/2012	10:36:27 AM	Helium MFC set to  0.000000
11/2/2012	10:36:27 AM	H2 MFC set to  0.000000
11/2/2012	10:36:27 AM	BCl3 MFC set to  0.000000
11/2/2012	10:36:27 AM	PH3 MFC set to  0.000000
11/2/2012	10:36:27 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:36:27 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:36:27 AM	Tube furnace set to 0
11/2/2012	10:36:28 AM	Run finished at 10:36 AM
11/2/2012	10:36:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2012	10:36:53 AM	SiCl4 post valve opened
11/2/2012	10:36:59 AM	Main Vac valve closed
11/2/2012	10:37:04 AM	Bypass valve opened
11/2/2012	10:38:56 AM	Recipe started at 10:38 AM
11/2/2012	10:38:56 AM	Helium valve closed
11/2/2012	10:38:56 AM	H2 valve closed
11/2/2012	10:38:56 AM	BCl3 valve closed
11/2/2012	10:38:56 AM	PH3 valve closed
11/2/2012	10:38:56 AM	SiCl4 pre valve closed
11/2/2012	10:38:56 AM	SiCl4 post valve closed
11/2/2012	10:38:56 AM	Main Vac valve closed
11/2/2012	10:38:56 AM	Bypass valve closed
11/2/2012	10:38:56 AM	Bubbler valve closed
11/2/2012	10:38:56 AM	Helium MFC set to  0.000000
11/2/2012	10:38:56 AM	H2 MFC set to  0.000000
11/2/2012	10:38:56 AM	BCl3 MFC set to  0.000000
11/2/2012	10:38:56 AM	PH3 MFC set to  0.000000
11/2/2012	10:38:56 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:38:56 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:38:56 AM	Tube furnace set to 0
11/2/2012	10:38:59 AM	H2 valve closed
11/2/2012	10:38:59 AM	BCl3 valve closed
11/2/2012	10:38:59 AM	PH3 valve closed
11/2/2012	10:38:59 AM	SiCl4 pre valve closed
11/2/2012	10:38:59 AM	Main Vac valve closed
11/2/2012	10:38:59 AM	Bypass valve closed
11/2/2012	10:38:59 AM	Bubbler valve closed
11/2/2012	10:38:59 AM	Helium valve opened
11/2/2012	10:38:59 AM	SiCl4 post valve opened
11/2/2012	10:38:59 AM	Helium MFC set to  500.000000
11/2/2012	10:38:59 AM	H2 MFC set to  0.000000
11/2/2012	10:38:59 AM	BCl3 MFC set to  0.000000
11/2/2012	10:38:59 AM	PH3 MFC set to  0.000000
11/2/2012	10:38:59 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:38:59 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:38:59 AM	Tube furnace set to 0
11/2/2012	10:40:34 AM	Helium valve closed
11/2/2012	10:40:34 AM	H2 valve closed
11/2/2012	10:40:34 AM	BCl3 valve closed
11/2/2012	10:40:34 AM	PH3 valve closed
11/2/2012	10:40:34 AM	SiCl4 pre valve closed
11/2/2012	10:40:34 AM	Main Vac valve closed
11/2/2012	10:40:34 AM	Bypass valve closed
11/2/2012	10:40:34 AM	Bubbler valve closed
11/2/2012	10:40:34 AM	SiCl4 post valve opened
11/2/2012	10:40:34 AM	Helium MFC set to  0.000000
11/2/2012	10:40:34 AM	H2 MFC set to  0.000000
11/2/2012	10:40:34 AM	BCl3 MFC set to  0.000000
11/2/2012	10:40:34 AM	PH3 MFC set to  0.000000
11/2/2012	10:40:34 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:40:34 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:40:34 AM	Tube furnace set to 0
11/2/2012	10:40:37 AM	Helium valve closed
11/2/2012	10:40:37 AM	H2 valve closed
11/2/2012	10:40:37 AM	BCl3 valve closed
11/2/2012	10:40:37 AM	PH3 valve closed
11/2/2012	10:40:37 AM	SiCl4 pre valve closed
11/2/2012	10:40:37 AM	Main Vac valve closed
11/2/2012	10:40:37 AM	Bubbler valve closed
11/2/2012	10:40:37 AM	SiCl4 post valve opened
11/2/2012	10:40:37 AM	Bypass valve opened
11/2/2012	10:40:37 AM	Helium MFC set to  0.000000
11/2/2012	10:40:37 AM	H2 MFC set to  0.000000
11/2/2012	10:40:37 AM	BCl3 MFC set to  0.000000
11/2/2012	10:40:37 AM	PH3 MFC set to  0.000000
11/2/2012	10:40:37 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:40:37 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:40:37 AM	Tube furnace set to 0
11/2/2012	10:42:13 AM	Helium valve closed
11/2/2012	10:42:13 AM	H2 valve closed
11/2/2012	10:42:13 AM	BCl3 valve closed
11/2/2012	10:42:13 AM	PH3 valve closed
11/2/2012	10:42:14 AM	SiCl4 pre valve closed
11/2/2012	10:42:14 AM	Bypass valve closed
11/2/2012	10:42:14 AM	Bubbler valve closed
11/2/2012	10:42:14 AM	SiCl4 post valve opened
11/2/2012	10:42:14 AM	Main Vac valve opened
11/2/2012	10:42:14 AM	Helium MFC set to  0.000000
11/2/2012	10:42:14 AM	H2 MFC set to  0.000000
11/2/2012	10:42:14 AM	BCl3 MFC set to  0.000000
11/2/2012	10:42:14 AM	PH3 MFC set to  0.000000
11/2/2012	10:42:14 AM	SiCl4 MFC set to  0.000000
11/2/2012	10:42:14 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	10:42:14 AM	Tube furnace set to 0
11/2/2012	11:12:14 AM	Helium valve closed
11/2/2012	11:12:14 AM	H2 valve closed
11/2/2012	11:12:14 AM	BCl3 valve closed
11/2/2012	11:12:14 AM	PH3 valve closed
11/2/2012	11:12:14 AM	SiCl4 pre valve closed
11/2/2012	11:12:14 AM	Main Vac valve closed
11/2/2012	11:12:14 AM	Bypass valve closed
11/2/2012	11:12:14 AM	Bubbler valve closed
11/2/2012	11:12:14 AM	SiCl4 post valve opened
11/2/2012	11:12:14 AM	Helium MFC set to  0.000000
11/2/2012	11:12:14 AM	H2 MFC set to  0.000000
11/2/2012	11:12:14 AM	BCl3 MFC set to  0.000000
11/2/2012	11:12:14 AM	PH3 MFC set to  0.000000
11/2/2012	11:12:14 AM	SiCl4 MFC set to  0.000000
11/2/2012	11:12:14 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	11:12:14 AM	Tube furnace set to 0
11/2/2012	11:12:17 AM	H2 valve closed
11/2/2012	11:12:17 AM	BCl3 valve closed
11/2/2012	11:12:17 AM	PH3 valve closed
11/2/2012	11:12:17 AM	SiCl4 pre valve closed
11/2/2012	11:12:17 AM	Main Vac valve closed
11/2/2012	11:12:17 AM	Bypass valve closed
11/2/2012	11:12:17 AM	Bubbler valve closed
11/2/2012	11:12:17 AM	Helium valve opened
11/2/2012	11:12:17 AM	SiCl4 post valve opened
11/2/2012	11:12:17 AM	Helium MFC set to  500.000000
11/2/2012	11:12:17 AM	H2 MFC set to  0.000000
11/2/2012	11:12:17 AM	BCl3 MFC set to  0.000000
11/2/2012	11:12:17 AM	PH3 MFC set to  0.000000
11/2/2012	11:12:17 AM	SiCl4 MFC set to  0.000000
11/2/2012	11:12:17 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	11:12:17 AM	Tube furnace set to 0
11/2/2012	11:13:32 AM	Helium valve closed
11/2/2012	11:13:32 AM	H2 valve closed
11/2/2012	11:13:32 AM	BCl3 valve closed
11/2/2012	11:13:32 AM	PH3 valve closed
11/2/2012	11:13:32 AM	SiCl4 pre valve closed
11/2/2012	11:13:32 AM	Main Vac valve closed
11/2/2012	11:13:32 AM	Bypass valve closed
11/2/2012	11:13:32 AM	Bubbler valve closed
11/2/2012	11:13:32 AM	SiCl4 post valve opened
11/2/2012	11:13:32 AM	Helium MFC set to  0.000000
11/2/2012	11:13:32 AM	H2 MFC set to  0.000000
11/2/2012	11:13:32 AM	BCl3 MFC set to  0.000000
11/2/2012	11:13:32 AM	PH3 MFC set to  0.000000
11/2/2012	11:13:32 AM	SiCl4 MFC set to  0.000000
11/2/2012	11:13:32 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	11:13:32 AM	Tube furnace set to 0
11/2/2012	11:13:35 AM	Helium valve closed
11/2/2012	11:13:35 AM	H2 valve closed
11/2/2012	11:13:35 AM	BCl3 valve closed
11/2/2012	11:13:35 AM	PH3 valve closed
11/2/2012	11:13:35 AM	SiCl4 pre valve closed
11/2/2012	11:13:35 AM	Main Vac valve closed
11/2/2012	11:13:35 AM	Bubbler valve closed
11/2/2012	11:13:35 AM	SiCl4 post valve opened
11/2/2012	11:13:35 AM	Bypass valve opened
11/2/2012	11:13:35 AM	Helium MFC set to  0.000000
11/2/2012	11:13:35 AM	H2 MFC set to  0.000000
11/2/2012	11:13:35 AM	BCl3 MFC set to  0.000000
11/2/2012	11:13:35 AM	PH3 MFC set to  0.000000
11/2/2012	11:13:35 AM	SiCl4 MFC set to  0.000000
11/2/2012	11:13:35 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	11:13:35 AM	Tube furnace set to 0
11/2/2012	11:14:42 AM	Helium valve closed
11/2/2012	11:14:42 AM	H2 valve closed
11/2/2012	11:14:42 AM	BCl3 valve closed
11/2/2012	11:14:42 AM	PH3 valve closed
11/2/2012	11:14:42 AM	SiCl4 pre valve closed
11/2/2012	11:14:42 AM	Bypass valve closed
11/2/2012	11:14:42 AM	Bubbler valve closed
11/2/2012	11:14:42 AM	SiCl4 post valve opened
11/2/2012	11:14:42 AM	Main Vac valve opened
11/2/2012	11:14:42 AM	Helium MFC set to  0.000000
11/2/2012	11:14:42 AM	H2 MFC set to  0.000000
11/2/2012	11:14:42 AM	BCl3 MFC set to  0.000000
11/2/2012	11:14:42 AM	PH3 MFC set to  0.000000
11/2/2012	11:14:42 AM	SiCl4 MFC set to  0.000000
11/2/2012	11:14:42 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	11:14:42 AM	Tube furnace set to 0
11/2/2012	11:44:42 AM	Helium valve closed
11/2/2012	11:44:42 AM	H2 valve closed
11/2/2012	11:44:42 AM	BCl3 valve closed
11/2/2012	11:44:42 AM	PH3 valve closed
11/2/2012	11:44:42 AM	SiCl4 pre valve closed
11/2/2012	11:44:42 AM	Main Vac valve closed
11/2/2012	11:44:42 AM	Bypass valve closed
11/2/2012	11:44:42 AM	Bubbler valve closed
11/2/2012	11:44:42 AM	SiCl4 post valve opened
11/2/2012	11:44:42 AM	Helium MFC set to  0.000000
11/2/2012	11:44:42 AM	H2 MFC set to  0.000000
11/2/2012	11:44:42 AM	BCl3 MFC set to  0.000000
11/2/2012	11:44:42 AM	PH3 MFC set to  0.000000
11/2/2012	11:44:42 AM	SiCl4 MFC set to  0.000000
11/2/2012	11:44:42 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	11:44:42 AM	Tube furnace set to 0
11/2/2012	11:44:45 AM	H2 valve closed
11/2/2012	11:44:45 AM	BCl3 valve closed
11/2/2012	11:44:45 AM	PH3 valve closed
11/2/2012	11:44:45 AM	SiCl4 pre valve closed
11/2/2012	11:44:45 AM	Main Vac valve closed
11/2/2012	11:44:45 AM	Bypass valve closed
11/2/2012	11:44:45 AM	Bubbler valve closed
11/2/2012	11:44:45 AM	Helium valve opened
11/2/2012	11:44:45 AM	SiCl4 post valve opened
11/2/2012	11:44:45 AM	Helium MFC set to  500.000000
11/2/2012	11:44:45 AM	H2 MFC set to  0.000000
11/2/2012	11:44:45 AM	BCl3 MFC set to  0.000000
11/2/2012	11:44:45 AM	PH3 MFC set to  0.000000
11/2/2012	11:44:45 AM	SiCl4 MFC set to  0.000000
11/2/2012	11:44:45 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	11:44:46 AM	Tube furnace set to 0
11/2/2012	11:46:00 AM	Helium valve closed
11/2/2012	11:46:00 AM	H2 valve closed
11/2/2012	11:46:00 AM	BCl3 valve closed
11/2/2012	11:46:00 AM	PH3 valve closed
11/2/2012	11:46:00 AM	SiCl4 pre valve closed
11/2/2012	11:46:00 AM	Main Vac valve closed
11/2/2012	11:46:00 AM	Bypass valve closed
11/2/2012	11:46:00 AM	Bubbler valve closed
11/2/2012	11:46:00 AM	SiCl4 post valve opened
11/2/2012	11:46:00 AM	Helium MFC set to  0.000000
11/2/2012	11:46:00 AM	H2 MFC set to  0.000000
11/2/2012	11:46:00 AM	BCl3 MFC set to  0.000000
11/2/2012	11:46:00 AM	PH3 MFC set to  0.000000
11/2/2012	11:46:00 AM	SiCl4 MFC set to  0.000000
11/2/2012	11:46:00 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	11:46:01 AM	Tube furnace set to 0
11/2/2012	11:46:04 AM	Helium valve closed
11/2/2012	11:46:04 AM	H2 valve closed
11/2/2012	11:46:04 AM	BCl3 valve closed
11/2/2012	11:46:04 AM	PH3 valve closed
11/2/2012	11:46:04 AM	SiCl4 pre valve closed
11/2/2012	11:46:04 AM	Main Vac valve closed
11/2/2012	11:46:04 AM	Bubbler valve closed
11/2/2012	11:46:04 AM	SiCl4 post valve opened
11/2/2012	11:46:04 AM	Bypass valve opened
11/2/2012	11:46:04 AM	Helium MFC set to  0.000000
11/2/2012	11:46:04 AM	H2 MFC set to  0.000000
11/2/2012	11:46:04 AM	BCl3 MFC set to  0.000000
11/2/2012	11:46:04 AM	PH3 MFC set to  0.000000
11/2/2012	11:46:04 AM	SiCl4 MFC set to  0.000000
11/2/2012	11:46:04 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	11:46:04 AM	Tube furnace set to 0
11/2/2012	11:47:09 AM	Helium valve closed
11/2/2012	11:47:09 AM	H2 valve closed
11/2/2012	11:47:09 AM	BCl3 valve closed
11/2/2012	11:47:09 AM	PH3 valve closed
11/2/2012	11:47:09 AM	SiCl4 pre valve closed
11/2/2012	11:47:09 AM	Bypass valve closed
11/2/2012	11:47:09 AM	Bubbler valve closed
11/2/2012	11:47:09 AM	SiCl4 post valve opened
11/2/2012	11:47:09 AM	Main Vac valve opened
11/2/2012	11:47:09 AM	Helium MFC set to  0.000000
11/2/2012	11:47:09 AM	H2 MFC set to  0.000000
11/2/2012	11:47:09 AM	BCl3 MFC set to  0.000000
11/2/2012	11:47:09 AM	PH3 MFC set to  0.000000
11/2/2012	11:47:09 AM	SiCl4 MFC set to  0.000000
11/2/2012	11:47:09 AM	Bypass solenoid MFC set to  0.000000
11/2/2012	11:47:09 AM	Tube furnace set to 0
11/2/2012	11:47:10 AM	Run finished at 11:47 AM
11/2/2012	12:00:54 PM	SiCl4 post valve closed
11/2/2012	12:00:57 PM	Bypass valve opened
11/2/2012	12:00:57 PM	Main Vac valve closed
11/2/2012	12:01:10 PM	Bypass valve closed
11/2/2012	12:01:14 PM	Bypass valve opened
11/2/2012	12:06:38 PM	Main Vac valve opened
11/2/2012	12:06:41 PM	Bypass valve closed
11/2/2012	12:07:54 PM	SiCl4 post valve opened
11/2/2012	12:15:58 PM	Main Vac valve closed
11/2/2012	12:15:58 PM	Bypass valve opened
11/2/2012	12:25:16 PM	Bypass valve closed
11/2/2012	12:25:16 PM	Main Vac valve opened
11/2/2012	12:39:02 PM	Main Vac valve closed
11/2/2012	12:39:07 PM	Helium MFC set to  100.000000
11/2/2012	12:39:10 PM	Helium valve opened
11/2/2012	12:39:40 PM	Helium valve closed
11/2/2012	12:39:43 PM	Bypass valve opened
11/2/2012	12:41:48 PM	Main Vac valve opened
11/2/2012	12:41:49 PM	Bypass valve closed
11/2/2012	12:44:01 PM	Main Vac valve closed
11/2/2012	12:44:02 PM	Helium valve opened
11/2/2012	12:44:02 PM	Helium valve closed
11/2/2012	12:44:09 PM	Helium valve opened
11/2/2012	12:44:29 PM	Helium valve closed
11/2/2012	12:44:31 PM	Bypass valve opened
11/2/2012	12:45:51 PM	Main Vac valve opened
11/2/2012	12:45:51 PM	Bypass valve closed
11/2/2012	12:46:53 PM	Main Vac valve closed
11/2/2012	12:46:55 PM	Helium valve opened
11/2/2012	12:47:20 PM	Helium valve closed
11/2/2012	12:47:21 PM	Bypass valve opened
11/2/2012	12:48:39 PM	Main Vac valve opened
11/2/2012	12:48:39 PM	Bypass valve closed
11/2/2012	12:52:57 PM	Helium valve opened
11/2/2012	12:53:19 PM	Helium valve closed
11/2/2012	12:53:20 PM	Main Vac valve closed
11/2/2012	12:53:21 PM	Helium valve opened
11/2/2012	12:53:42 PM	Helium MFC set to  200.000000
11/2/2012	12:54:01 PM	Helium MFC set to  300.000000
11/2/2012	12:54:26 PM	Helium valve closed
11/2/2012	12:54:28 PM	Bypass valve opened
11/2/2012	12:55:47 PM	Main Vac valve opened
11/2/2012	12:55:48 PM	Bypass valve closed
11/2/2012	1:05:09 PM	Main Vac valve closed
11/2/2012	1:05:11 PM	Helium valve opened
11/2/2012	1:06:11 PM	Helium valve closed
11/2/2012	1:06:13 PM	Bypass valve opened
11/2/2012	1:07:25 PM	Main Vac valve opened
11/2/2012	1:07:26 PM	Bypass valve closed
11/2/2012	1:17:11 PM	Main Vac valve closed
11/2/2012	1:17:12 PM	Helium valve opened
11/2/2012	1:17:28 PM	Helium MFC set to  500.000000
11/2/2012	1:18:36 PM	Helium valve closed
11/2/2012	1:18:43 PM	SiCl4 post valve closed
11/2/2012	1:19:31 PM	Helium MFC set to  0.000000
11/2/2012	1:19:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/2/2012	1:19:38 PM	Recipe started at 1:19 PM
11/2/2012	1:19:38 PM	Helium valve closed
11/2/2012	1:19:38 PM	H2 valve closed
11/2/2012	1:19:38 PM	BCl3 valve closed
11/2/2012	1:19:38 PM	PH3 valve closed
11/2/2012	1:19:38 PM	SiCl4 pre valve closed
11/2/2012	1:19:38 PM	SiCl4 post valve closed
11/2/2012	1:19:38 PM	Main Vac valve closed
11/2/2012	1:19:38 PM	Bypass valve closed
11/2/2012	1:19:38 PM	Bubbler valve closed
11/2/2012	1:19:38 PM	Helium MFC set to  0.000000
11/2/2012	1:19:38 PM	H2 MFC set to  0.000000
11/2/2012	1:19:38 PM	BCl3 MFC set to  0.000000
11/2/2012	1:19:38 PM	PH3 MFC set to  0.000000
11/2/2012	1:19:38 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:19:38 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:19:38 PM	Tube furnace set to 0
11/2/2012	1:19:38 PM	Run finished at 1:19 PM
11/2/2012	1:19:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/2/2012	1:19:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2012	1:19:41 PM	Recipe started at 1:19 PM
11/2/2012	1:19:41 PM	Helium valve closed
11/2/2012	1:19:41 PM	H2 valve closed
11/2/2012	1:19:41 PM	BCl3 valve closed
11/2/2012	1:19:41 PM	PH3 valve closed
11/2/2012	1:19:41 PM	SiCl4 pre valve closed
11/2/2012	1:19:41 PM	SiCl4 post valve closed
11/2/2012	1:19:41 PM	Main Vac valve closed
11/2/2012	1:19:41 PM	Bubbler valve closed
11/2/2012	1:19:41 PM	Bypass valve opened
11/2/2012	1:19:41 PM	Helium MFC set to  0.000000
11/2/2012	1:19:41 PM	H2 MFC set to  0.000000
11/2/2012	1:19:41 PM	BCl3 MFC set to  0.000000
11/2/2012	1:19:41 PM	PH3 MFC set to  0.000000
11/2/2012	1:19:41 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:19:41 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:19:42 PM	Tube furnace set to 0
11/2/2012	1:20:47 PM	Helium valve closed
11/2/2012	1:20:47 PM	H2 valve closed
11/2/2012	1:20:47 PM	BCl3 valve closed
11/2/2012	1:20:47 PM	PH3 valve closed
11/2/2012	1:20:47 PM	SiCl4 pre valve closed
11/2/2012	1:20:47 PM	SiCl4 post valve closed
11/2/2012	1:20:47 PM	Main Vac valve closed
11/2/2012	1:20:47 PM	Bubbler valve closed
11/2/2012	1:20:47 PM	Bypass valve opened
11/2/2012	1:20:47 PM	Helium MFC set to  0.000000
11/2/2012	1:20:47 PM	H2 MFC set to  0.000000
11/2/2012	1:20:47 PM	BCl3 MFC set to  0.000000
11/2/2012	1:20:47 PM	PH3 MFC set to  0.000000
11/2/2012	1:20:47 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:20:47 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:20:47 PM	Tube furnace set to 0
11/2/2012	1:21:15 PM	Helium valve closed
11/2/2012	1:21:15 PM	H2 valve closed
11/2/2012	1:21:15 PM	BCl3 valve closed
11/2/2012	1:21:15 PM	PH3 valve closed
11/2/2012	1:21:15 PM	SiCl4 pre valve closed
11/2/2012	1:21:15 PM	SiCl4 post valve closed
11/2/2012	1:21:15 PM	Bypass valve closed
11/2/2012	1:21:15 PM	Bubbler valve closed
11/2/2012	1:21:15 PM	Main Vac valve opened
11/2/2012	1:21:15 PM	Helium MFC set to  0.000000
11/2/2012	1:21:15 PM	H2 MFC set to  0.000000
11/2/2012	1:21:15 PM	BCl3 MFC set to  0.000000
11/2/2012	1:21:15 PM	PH3 MFC set to  0.000000
11/2/2012	1:21:15 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:21:15 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:21:15 PM	Tube furnace set to 0
11/2/2012	1:21:16 PM	Run finished at 1:21 PM
11/2/2012	1:21:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2012	1:21:38 PM	Main Vac valve closed
11/2/2012	1:21:39 PM	Bypass valve opened
11/2/2012	1:22:42 PM	Main Vac valve opened
11/2/2012	1:22:42 PM	Bypass valve closed
11/2/2012	1:25:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/2/2012	1:25:17 PM	Recipe started at 1:25 PM
11/2/2012	1:25:17 PM	Helium valve closed
11/2/2012	1:25:17 PM	H2 valve closed
11/2/2012	1:25:17 PM	BCl3 valve closed
11/2/2012	1:25:17 PM	PH3 valve closed
11/2/2012	1:25:17 PM	SiCl4 pre valve closed
11/2/2012	1:25:17 PM	SiCl4 post valve closed
11/2/2012	1:25:17 PM	Main Vac valve closed
11/2/2012	1:25:17 PM	Bypass valve closed
11/2/2012	1:25:17 PM	Bubbler valve closed
11/2/2012	1:25:17 PM	Helium MFC set to  0.000000
11/2/2012	1:25:17 PM	H2 MFC set to  0.000000
11/2/2012	1:25:17 PM	BCl3 MFC set to  0.000000
11/2/2012	1:25:17 PM	PH3 MFC set to  0.000000
11/2/2012	1:25:17 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:25:17 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:25:17 PM	Tube furnace set to 0
11/2/2012	1:25:20 PM	H2 valve closed
11/2/2012	1:25:20 PM	BCl3 valve closed
11/2/2012	1:25:20 PM	PH3 valve closed
11/2/2012	1:25:20 PM	SiCl4 pre valve closed
11/2/2012	1:25:20 PM	SiCl4 post valve closed
11/2/2012	1:25:20 PM	Main Vac valve closed
11/2/2012	1:25:20 PM	Bypass valve closed
11/2/2012	1:25:20 PM	Bubbler valve closed
11/2/2012	1:25:20 PM	Helium valve opened
11/2/2012	1:25:20 PM	Helium MFC set to  500.000000
11/2/2012	1:25:20 PM	H2 MFC set to  0.000000
11/2/2012	1:25:20 PM	BCl3 MFC set to  0.000000
11/2/2012	1:25:20 PM	PH3 MFC set to  0.000000
11/2/2012	1:25:20 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:25:20 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:25:21 PM	Tube furnace set to 0
11/2/2012	1:26:35 PM	Helium valve closed
11/2/2012	1:26:35 PM	H2 valve closed
11/2/2012	1:26:35 PM	BCl3 valve closed
11/2/2012	1:26:35 PM	PH3 valve closed
11/2/2012	1:26:35 PM	SiCl4 pre valve closed
11/2/2012	1:26:35 PM	SiCl4 post valve closed
11/2/2012	1:26:35 PM	Main Vac valve closed
11/2/2012	1:26:35 PM	Bypass valve closed
11/2/2012	1:26:35 PM	Bubbler valve closed
11/2/2012	1:26:35 PM	Helium MFC set to  0.000000
11/2/2012	1:26:35 PM	H2 MFC set to  0.000000
11/2/2012	1:26:35 PM	BCl3 MFC set to  0.000000
11/2/2012	1:26:35 PM	PH3 MFC set to  0.000000
11/2/2012	1:26:35 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:26:35 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:26:35 PM	Tube furnace set to 0
11/2/2012	1:26:36 PM	Run finished at 1:26 PM
11/2/2012	1:26:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/2/2012	1:32:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2012	1:32:48 PM	Recipe started at 1:32 PM
11/2/2012	1:32:48 PM	Helium valve closed
11/2/2012	1:32:48 PM	H2 valve closed
11/2/2012	1:32:48 PM	BCl3 valve closed
11/2/2012	1:32:48 PM	PH3 valve closed
11/2/2012	1:32:48 PM	SiCl4 pre valve closed
11/2/2012	1:32:48 PM	SiCl4 post valve closed
11/2/2012	1:32:48 PM	Main Vac valve closed
11/2/2012	1:32:48 PM	Bubbler valve closed
11/2/2012	1:32:48 PM	Bypass valve opened
11/2/2012	1:32:48 PM	Helium MFC set to  0.000000
11/2/2012	1:32:48 PM	H2 MFC set to  0.000000
11/2/2012	1:32:48 PM	BCl3 MFC set to  0.000000
11/2/2012	1:32:48 PM	PH3 MFC set to  0.000000
11/2/2012	1:32:48 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:32:48 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:32:48 PM	Tube furnace set to 0
11/2/2012	1:34:02 PM	Helium valve closed
11/2/2012	1:34:02 PM	H2 valve closed
11/2/2012	1:34:03 PM	BCl3 valve closed
11/2/2012	1:34:03 PM	PH3 valve closed
11/2/2012	1:34:03 PM	SiCl4 pre valve closed
11/2/2012	1:34:03 PM	SiCl4 post valve closed
11/2/2012	1:34:03 PM	Main Vac valve closed
11/2/2012	1:34:03 PM	Bubbler valve closed
11/2/2012	1:34:03 PM	Bypass valve opened
11/2/2012	1:34:03 PM	Helium MFC set to  0.000000
11/2/2012	1:34:03 PM	H2 MFC set to  0.000000
11/2/2012	1:34:03 PM	BCl3 MFC set to  0.000000
11/2/2012	1:34:03 PM	PH3 MFC set to  0.000000
11/2/2012	1:34:03 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:34:03 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:34:03 PM	Tube furnace set to 0
11/2/2012	1:34:34 PM	Helium valve closed
11/2/2012	1:34:34 PM	H2 valve closed
11/2/2012	1:34:34 PM	BCl3 valve closed
11/2/2012	1:34:34 PM	PH3 valve closed
11/2/2012	1:34:34 PM	SiCl4 pre valve closed
11/2/2012	1:34:34 PM	SiCl4 post valve closed
11/2/2012	1:34:34 PM	Bypass valve closed
11/2/2012	1:34:34 PM	Bubbler valve closed
11/2/2012	1:34:34 PM	Main Vac valve opened
11/2/2012	1:34:34 PM	Helium MFC set to  0.000000
11/2/2012	1:34:34 PM	H2 MFC set to  0.000000
11/2/2012	1:34:34 PM	BCl3 MFC set to  0.000000
11/2/2012	1:34:34 PM	PH3 MFC set to  0.000000
11/2/2012	1:34:34 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:34:34 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:34:34 PM	Tube furnace set to 0
11/2/2012	1:34:35 PM	Run finished at 1:34 PM
11/2/2012	1:34:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2012	1:54:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/2/2012	1:54:51 PM	Recipe started at 1:54 PM
11/2/2012	1:54:51 PM	Helium valve closed
11/2/2012	1:54:51 PM	H2 valve closed
11/2/2012	1:54:51 PM	BCl3 valve closed
11/2/2012	1:54:51 PM	PH3 valve closed
11/2/2012	1:54:51 PM	SiCl4 pre valve closed
11/2/2012	1:54:51 PM	SiCl4 post valve closed
11/2/2012	1:54:51 PM	Main Vac valve closed
11/2/2012	1:54:51 PM	Bubbler valve closed
11/2/2012	1:54:51 PM	Bypass valve opened
11/2/2012	1:54:51 PM	Helium MFC set to  0.000000
11/2/2012	1:54:51 PM	H2 MFC set to  0.000000
11/2/2012	1:54:51 PM	BCl3 MFC set to  0.000000
11/2/2012	1:54:51 PM	PH3 MFC set to  0.000000
11/2/2012	1:54:51 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:54:51 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:54:51 PM	Tube furnace set to 0
11/2/2012	1:54:52 PM	Helium valve closed
11/2/2012	1:54:52 PM	H2 valve closed
11/2/2012	1:54:52 PM	BCl3 valve closed
11/2/2012	1:54:52 PM	PH3 valve closed
11/2/2012	1:54:52 PM	SiCl4 pre valve closed
11/2/2012	1:54:52 PM	SiCl4 post valve closed
11/2/2012	1:54:52 PM	Main Vac valve closed
11/2/2012	1:54:52 PM	Bubbler valve closed
11/2/2012	1:54:52 PM	Bypass valve opened
11/2/2012	1:54:52 PM	Helium MFC set to  0.000000
11/2/2012	1:54:52 PM	H2 MFC set to  0.000000
11/2/2012	1:54:52 PM	BCl3 MFC set to  0.000000
11/2/2012	1:54:52 PM	PH3 MFC set to  0.000000
11/2/2012	1:54:52 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:54:52 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:54:52 PM	Tube furnace set to 0
11/2/2012	1:54:54 PM	Helium valve closed
11/2/2012	1:54:54 PM	H2 valve closed
11/2/2012	1:54:54 PM	BCl3 valve closed
11/2/2012	1:54:54 PM	PH3 valve closed
11/2/2012	1:54:54 PM	SiCl4 pre valve closed
11/2/2012	1:54:54 PM	SiCl4 post valve closed
11/2/2012	1:54:54 PM	Bypass valve closed
11/2/2012	1:54:54 PM	Bubbler valve closed
11/2/2012	1:54:54 PM	Main Vac valve opened
11/2/2012	1:54:54 PM	Helium MFC set to  0.000000
11/2/2012	1:54:54 PM	H2 MFC set to  0.000000
11/2/2012	1:54:55 PM	BCl3 MFC set to  0.000000
11/2/2012	1:54:55 PM	PH3 MFC set to  0.000000
11/2/2012	1:54:55 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:54:55 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:54:55 PM	Tube furnace set to 0
11/2/2012	1:54:55 PM	H2 valve closed
11/2/2012	1:54:55 PM	BCl3 valve closed
11/2/2012	1:54:55 PM	PH3 valve closed
11/2/2012	1:54:55 PM	SiCl4 pre valve closed
11/2/2012	1:54:55 PM	SiCl4 post valve closed
11/2/2012	1:54:55 PM	Bypass valve closed
11/2/2012	1:54:55 PM	Bubbler valve closed
11/2/2012	1:54:55 PM	Helium valve opened
11/2/2012	1:54:55 PM	Main Vac valve opened
11/2/2012	1:54:55 PM	Helium MFC set to  20.000000
11/2/2012	1:54:55 PM	H2 MFC set to  0.000000
11/2/2012	1:54:55 PM	BCl3 MFC set to  0.000000
11/2/2012	1:54:55 PM	PH3 MFC set to  0.000000
11/2/2012	1:54:55 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:54:55 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:54:55 PM	Tube furnace set to 0
11/2/2012	1:55:25 PM	Helium valve closed
11/2/2012	1:55:25 PM	H2 valve closed
11/2/2012	1:55:25 PM	BCl3 valve closed
11/2/2012	1:55:25 PM	PH3 valve closed
11/2/2012	1:55:25 PM	SiCl4 pre valve closed
11/2/2012	1:55:25 PM	SiCl4 post valve closed
11/2/2012	1:55:25 PM	Bypass valve closed
11/2/2012	1:55:25 PM	Bubbler valve closed
11/2/2012	1:55:25 PM	Main Vac valve opened
11/2/2012	1:55:25 PM	Helium MFC set to  0.000000
11/2/2012	1:55:25 PM	H2 MFC set to  0.000000
11/2/2012	1:55:25 PM	BCl3 MFC set to  0.000000
11/2/2012	1:55:25 PM	PH3 MFC set to  0.000000
11/2/2012	1:55:25 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:55:26 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:55:26 PM	Tube furnace set to 0
11/2/2012	1:55:56 PM	H2 valve closed
11/2/2012	1:55:56 PM	BCl3 valve closed
11/2/2012	1:55:56 PM	PH3 valve closed
11/2/2012	1:55:56 PM	SiCl4 pre valve closed
11/2/2012	1:55:56 PM	SiCl4 post valve closed
11/2/2012	1:55:56 PM	Bypass valve closed
11/2/2012	1:55:56 PM	Bubbler valve closed
11/2/2012	1:55:56 PM	Helium valve opened
11/2/2012	1:55:56 PM	Main Vac valve opened
11/2/2012	1:55:56 PM	Helium MFC set to  20.000000
11/2/2012	1:55:56 PM	H2 MFC set to  0.000000
11/2/2012	1:55:56 PM	BCl3 MFC set to  0.000000
11/2/2012	1:55:56 PM	PH3 MFC set to  0.000000
11/2/2012	1:55:56 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:55:56 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:55:56 PM	Tube furnace set to 0
11/2/2012	1:56:26 PM	Helium valve closed
11/2/2012	1:56:26 PM	H2 valve closed
11/2/2012	1:56:26 PM	BCl3 valve closed
11/2/2012	1:56:26 PM	PH3 valve closed
11/2/2012	1:56:26 PM	SiCl4 pre valve closed
11/2/2012	1:56:26 PM	SiCl4 post valve closed
11/2/2012	1:56:26 PM	Bypass valve closed
11/2/2012	1:56:26 PM	Bubbler valve closed
11/2/2012	1:56:26 PM	Main Vac valve opened
11/2/2012	1:56:26 PM	Helium MFC set to  0.000000
11/2/2012	1:56:26 PM	H2 MFC set to  0.000000
11/2/2012	1:56:26 PM	BCl3 MFC set to  0.000000
11/2/2012	1:56:26 PM	PH3 MFC set to  0.000000
11/2/2012	1:56:26 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:56:26 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:56:26 PM	Tube furnace set to 0
11/2/2012	1:56:56 PM	H2 valve closed
11/2/2012	1:56:56 PM	BCl3 valve closed
11/2/2012	1:56:56 PM	PH3 valve closed
11/2/2012	1:56:56 PM	SiCl4 pre valve closed
11/2/2012	1:56:56 PM	SiCl4 post valve closed
11/2/2012	1:56:56 PM	Bypass valve closed
11/2/2012	1:56:56 PM	Bubbler valve closed
11/2/2012	1:56:56 PM	Helium valve opened
11/2/2012	1:56:56 PM	Main Vac valve opened
11/2/2012	1:56:56 PM	Helium MFC set to  20.000000
11/2/2012	1:56:56 PM	H2 MFC set to  0.000000
11/2/2012	1:56:56 PM	BCl3 MFC set to  0.000000
11/2/2012	1:56:56 PM	PH3 MFC set to  0.000000
11/2/2012	1:56:56 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:56:56 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:56:56 PM	Tube furnace set to 0
11/2/2012	1:57:26 PM	Helium valve closed
11/2/2012	1:57:26 PM	H2 valve closed
11/2/2012	1:57:26 PM	BCl3 valve closed
11/2/2012	1:57:26 PM	PH3 valve closed
11/2/2012	1:57:26 PM	SiCl4 pre valve closed
11/2/2012	1:57:26 PM	SiCl4 post valve closed
11/2/2012	1:57:26 PM	Bypass valve closed
11/2/2012	1:57:26 PM	Bubbler valve closed
11/2/2012	1:57:26 PM	Main Vac valve opened
11/2/2012	1:57:26 PM	Helium MFC set to  0.000000
11/2/2012	1:57:26 PM	H2 MFC set to  0.000000
11/2/2012	1:57:26 PM	BCl3 MFC set to  0.000000
11/2/2012	1:57:26 PM	PH3 MFC set to  0.000000
11/2/2012	1:57:26 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:57:26 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:57:27 PM	Tube furnace set to 0
11/2/2012	1:57:57 PM	H2 valve closed
11/2/2012	1:57:57 PM	BCl3 valve closed
11/2/2012	1:57:57 PM	PH3 valve closed
11/2/2012	1:57:57 PM	SiCl4 pre valve closed
11/2/2012	1:57:57 PM	SiCl4 post valve closed
11/2/2012	1:57:57 PM	Bypass valve closed
11/2/2012	1:57:57 PM	Bubbler valve closed
11/2/2012	1:57:57 PM	Helium valve opened
11/2/2012	1:57:57 PM	Main Vac valve opened
11/2/2012	1:57:57 PM	Helium MFC set to  20.000000
11/2/2012	1:57:57 PM	H2 MFC set to  0.000000
11/2/2012	1:57:57 PM	BCl3 MFC set to  0.000000
11/2/2012	1:57:57 PM	PH3 MFC set to  0.000000
11/2/2012	1:57:57 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:57:57 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:57:57 PM	Tube furnace set to 0
11/2/2012	1:58:27 PM	Helium valve closed
11/2/2012	1:58:27 PM	H2 valve closed
11/2/2012	1:58:27 PM	BCl3 valve closed
11/2/2012	1:58:27 PM	PH3 valve closed
11/2/2012	1:58:27 PM	SiCl4 pre valve closed
11/2/2012	1:58:27 PM	SiCl4 post valve closed
11/2/2012	1:58:27 PM	Bypass valve closed
11/2/2012	1:58:27 PM	Bubbler valve closed
11/2/2012	1:58:27 PM	Main Vac valve opened
11/2/2012	1:58:27 PM	Helium MFC set to  0.000000
11/2/2012	1:58:27 PM	H2 MFC set to  0.000000
11/2/2012	1:58:27 PM	BCl3 MFC set to  0.000000
11/2/2012	1:58:27 PM	PH3 MFC set to  0.000000
11/2/2012	1:58:27 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:58:27 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:58:27 PM	Tube furnace set to 0
11/2/2012	1:58:57 PM	H2 valve closed
11/2/2012	1:58:57 PM	BCl3 valve closed
11/2/2012	1:58:57 PM	PH3 valve closed
11/2/2012	1:58:57 PM	SiCl4 pre valve closed
11/2/2012	1:58:57 PM	SiCl4 post valve closed
11/2/2012	1:58:57 PM	Bypass valve closed
11/2/2012	1:58:57 PM	Bubbler valve closed
11/2/2012	1:58:57 PM	Helium valve opened
11/2/2012	1:58:57 PM	Main Vac valve opened
11/2/2012	1:58:57 PM	Helium MFC set to  20.000000
11/2/2012	1:58:57 PM	H2 MFC set to  0.000000
11/2/2012	1:58:57 PM	BCl3 MFC set to  0.000000
11/2/2012	1:58:57 PM	PH3 MFC set to  0.000000
11/2/2012	1:58:57 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:58:57 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:58:57 PM	Tube furnace set to 0
11/2/2012	1:59:27 PM	Helium valve closed
11/2/2012	1:59:27 PM	H2 valve closed
11/2/2012	1:59:27 PM	BCl3 valve closed
11/2/2012	1:59:27 PM	PH3 valve closed
11/2/2012	1:59:27 PM	SiCl4 pre valve closed
11/2/2012	1:59:27 PM	SiCl4 post valve closed
11/2/2012	1:59:27 PM	Bypass valve closed
11/2/2012	1:59:27 PM	Bubbler valve closed
11/2/2012	1:59:27 PM	Main Vac valve opened
11/2/2012	1:59:27 PM	Helium MFC set to  0.000000
11/2/2012	1:59:27 PM	H2 MFC set to  0.000000
11/2/2012	1:59:27 PM	BCl3 MFC set to  0.000000
11/2/2012	1:59:27 PM	PH3 MFC set to  0.000000
11/2/2012	1:59:27 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:59:27 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:59:28 PM	Tube furnace set to 0
11/2/2012	1:59:58 PM	H2 valve closed
11/2/2012	1:59:58 PM	BCl3 valve closed
11/2/2012	1:59:58 PM	PH3 valve closed
11/2/2012	1:59:58 PM	SiCl4 pre valve closed
11/2/2012	1:59:58 PM	SiCl4 post valve closed
11/2/2012	1:59:58 PM	Bypass valve closed
11/2/2012	1:59:58 PM	Bubbler valve closed
11/2/2012	1:59:58 PM	Helium valve opened
11/2/2012	1:59:58 PM	Main Vac valve opened
11/2/2012	1:59:58 PM	Helium MFC set to  20.000000
11/2/2012	1:59:58 PM	H2 MFC set to  0.000000
11/2/2012	1:59:58 PM	BCl3 MFC set to  0.000000
11/2/2012	1:59:58 PM	PH3 MFC set to  0.000000
11/2/2012	1:59:58 PM	SiCl4 MFC set to  0.000000
11/2/2012	1:59:58 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	1:59:58 PM	Tube furnace set to 0
11/2/2012	2:00:28 PM	Helium valve closed
11/2/2012	2:00:28 PM	H2 valve closed
11/2/2012	2:00:28 PM	BCl3 valve closed
11/2/2012	2:00:28 PM	PH3 valve closed
11/2/2012	2:00:28 PM	SiCl4 pre valve closed
11/2/2012	2:00:28 PM	SiCl4 post valve closed
11/2/2012	2:00:28 PM	Bypass valve closed
11/2/2012	2:00:28 PM	Bubbler valve closed
11/2/2012	2:00:28 PM	Main Vac valve opened
11/2/2012	2:00:28 PM	Helium MFC set to  0.000000
11/2/2012	2:00:28 PM	H2 MFC set to  0.000000
11/2/2012	2:00:28 PM	BCl3 MFC set to  0.000000
11/2/2012	2:00:28 PM	PH3 MFC set to  0.000000
11/2/2012	2:00:28 PM	SiCl4 MFC set to  0.000000
11/2/2012	2:00:28 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	2:00:28 PM	Tube furnace set to 0
11/2/2012	2:00:58 PM	H2 valve closed
11/2/2012	2:00:58 PM	BCl3 valve closed
11/2/2012	2:00:58 PM	PH3 valve closed
11/2/2012	2:00:58 PM	SiCl4 pre valve closed
11/2/2012	2:00:58 PM	SiCl4 post valve closed
11/2/2012	2:00:58 PM	Bypass valve closed
11/2/2012	2:00:58 PM	Bubbler valve closed
11/2/2012	2:00:58 PM	Helium valve opened
11/2/2012	2:00:58 PM	Main Vac valve opened
11/2/2012	2:00:58 PM	Helium MFC set to  20.000000
11/2/2012	2:00:58 PM	H2 MFC set to  0.000000
11/2/2012	2:00:58 PM	BCl3 MFC set to  0.000000
11/2/2012	2:00:58 PM	PH3 MFC set to  0.000000
11/2/2012	2:00:58 PM	SiCl4 MFC set to  0.000000
11/2/2012	2:00:58 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	2:00:58 PM	Tube furnace set to 0
11/2/2012	2:01:28 PM	Helium valve closed
11/2/2012	2:01:28 PM	H2 valve closed
11/2/2012	2:01:28 PM	BCl3 valve closed
11/2/2012	2:01:28 PM	PH3 valve closed
11/2/2012	2:01:28 PM	SiCl4 pre valve closed
11/2/2012	2:01:28 PM	SiCl4 post valve closed
11/2/2012	2:01:28 PM	Bypass valve closed
11/2/2012	2:01:28 PM	Bubbler valve closed
11/2/2012	2:01:28 PM	Main Vac valve opened
11/2/2012	2:01:28 PM	Helium MFC set to  0.000000
11/2/2012	2:01:28 PM	H2 MFC set to  0.000000
11/2/2012	2:01:28 PM	BCl3 MFC set to  0.000000
11/2/2012	2:01:28 PM	PH3 MFC set to  0.000000
11/2/2012	2:01:28 PM	SiCl4 MFC set to  0.000000
11/2/2012	2:01:28 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	2:01:29 PM	Tube furnace set to 0
11/2/2012	2:01:59 PM	H2 valve closed
11/2/2012	2:01:59 PM	BCl3 valve closed
11/2/2012	2:01:59 PM	PH3 valve closed
11/2/2012	2:01:59 PM	SiCl4 pre valve closed
11/2/2012	2:01:59 PM	SiCl4 post valve closed
11/2/2012	2:01:59 PM	Bypass valve closed
11/2/2012	2:01:59 PM	Bubbler valve closed
11/2/2012	2:01:59 PM	Helium valve opened
11/2/2012	2:01:59 PM	Main Vac valve opened
11/2/2012	2:01:59 PM	Helium MFC set to  20.000000
11/2/2012	2:01:59 PM	H2 MFC set to  0.000000
11/2/2012	2:01:59 PM	BCl3 MFC set to  0.000000
11/2/2012	2:01:59 PM	PH3 MFC set to  0.000000
11/2/2012	2:01:59 PM	SiCl4 MFC set to  0.000000
11/2/2012	2:01:59 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	2:01:59 PM	Tube furnace set to 0
11/2/2012	2:02:29 PM	Helium valve closed
11/2/2012	2:02:29 PM	H2 valve closed
11/2/2012	2:02:29 PM	BCl3 valve closed
11/2/2012	2:02:29 PM	PH3 valve closed
11/2/2012	2:02:29 PM	SiCl4 pre valve closed
11/2/2012	2:02:29 PM	SiCl4 post valve closed
11/2/2012	2:02:29 PM	Bypass valve closed
11/2/2012	2:02:29 PM	Bubbler valve closed
11/2/2012	2:02:29 PM	Main Vac valve opened
11/2/2012	2:02:29 PM	Helium MFC set to  0.000000
11/2/2012	2:02:29 PM	H2 MFC set to  0.000000
11/2/2012	2:02:29 PM	BCl3 MFC set to  0.000000
11/2/2012	2:02:29 PM	PH3 MFC set to  0.000000
11/2/2012	2:02:29 PM	SiCl4 MFC set to  0.000000
11/2/2012	2:02:29 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	2:02:29 PM	Tube furnace set to 0
11/2/2012	2:02:59 PM	H2 valve closed
11/2/2012	2:02:59 PM	BCl3 valve closed
11/2/2012	2:02:59 PM	PH3 valve closed
11/2/2012	2:02:59 PM	SiCl4 pre valve closed
11/2/2012	2:02:59 PM	SiCl4 post valve closed
11/2/2012	2:02:59 PM	Bypass valve closed
11/2/2012	2:02:59 PM	Bubbler valve closed
11/2/2012	2:02:59 PM	Helium valve opened
11/2/2012	2:02:59 PM	Main Vac valve opened
11/2/2012	2:02:59 PM	Helium MFC set to  20.000000
11/2/2012	2:02:59 PM	H2 MFC set to  0.000000
11/2/2012	2:02:59 PM	BCl3 MFC set to  0.000000
11/2/2012	2:02:59 PM	PH3 MFC set to  0.000000
11/2/2012	2:02:59 PM	SiCl4 MFC set to  0.000000
11/2/2012	2:02:59 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	2:02:59 PM	Tube furnace set to 0
11/2/2012	2:03:29 PM	Helium valve closed
11/2/2012	2:03:29 PM	H2 valve closed
11/2/2012	2:03:29 PM	BCl3 valve closed
11/2/2012	2:03:29 PM	PH3 valve closed
11/2/2012	2:03:29 PM	SiCl4 pre valve closed
11/2/2012	2:03:29 PM	SiCl4 post valve closed
11/2/2012	2:03:29 PM	Bypass valve closed
11/2/2012	2:03:29 PM	Bubbler valve closed
11/2/2012	2:03:29 PM	Main Vac valve opened
11/2/2012	2:03:29 PM	Helium MFC set to  0.000000
11/2/2012	2:03:29 PM	H2 MFC set to  0.000000
11/2/2012	2:03:29 PM	BCl3 MFC set to  0.000000
11/2/2012	2:03:29 PM	PH3 MFC set to  0.000000
11/2/2012	2:03:29 PM	SiCl4 MFC set to  0.000000
11/2/2012	2:03:29 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	2:03:30 PM	Tube furnace set to 0
11/2/2012	2:04:00 PM	H2 valve closed
11/2/2012	2:04:00 PM	BCl3 valve closed
11/2/2012	2:04:00 PM	PH3 valve closed
11/2/2012	2:04:00 PM	SiCl4 pre valve closed
11/2/2012	2:04:00 PM	SiCl4 post valve closed
11/2/2012	2:04:00 PM	Bypass valve closed
11/2/2012	2:04:00 PM	Bubbler valve closed
11/2/2012	2:04:00 PM	Helium valve opened
11/2/2012	2:04:00 PM	Main Vac valve opened
11/2/2012	2:04:00 PM	Helium MFC set to  20.000000
11/2/2012	2:04:00 PM	H2 MFC set to  0.000000
11/2/2012	2:04:00 PM	BCl3 MFC set to  0.000000
11/2/2012	2:04:00 PM	PH3 MFC set to  0.000000
11/2/2012	2:04:00 PM	SiCl4 MFC set to  0.000000
11/2/2012	2:04:00 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	2:04:00 PM	Tube furnace set to 0
11/2/2012	2:04:30 PM	Helium valve closed
11/2/2012	2:04:30 PM	H2 valve closed
11/2/2012	2:04:30 PM	BCl3 valve closed
11/2/2012	2:04:30 PM	PH3 valve closed
11/2/2012	2:04:30 PM	SiCl4 pre valve closed
11/2/2012	2:04:30 PM	SiCl4 post valve closed
11/2/2012	2:04:30 PM	Bypass valve closed
11/2/2012	2:04:30 PM	Bubbler valve closed
11/2/2012	2:04:30 PM	Main Vac valve opened
11/2/2012	2:04:30 PM	Helium MFC set to  0.000000
11/2/2012	2:04:30 PM	H2 MFC set to  0.000000
11/2/2012	2:04:30 PM	BCl3 MFC set to  0.000000
11/2/2012	2:04:30 PM	PH3 MFC set to  0.000000
11/2/2012	2:04:30 PM	SiCl4 MFC set to  0.000000
11/2/2012	2:04:30 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	2:04:30 PM	Tube furnace set to 0
11/2/2012	2:04:31 PM	Run finished at 2:04 PM
11/2/2012	2:04:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
11/2/2012	3:06:24 PM	Main Vac valve closed
11/2/2012	3:06:37 PM	Main Vac valve opened
11/2/2012	3:07:54 PM	Recipe started at 3:07 PM
11/2/2012	3:07:54 PM	Helium valve closed
11/2/2012	3:07:54 PM	H2 valve closed
11/2/2012	3:07:54 PM	BCl3 valve closed
11/2/2012	3:07:54 PM	PH3 valve closed
11/2/2012	3:07:54 PM	SiCl4 pre valve closed
11/2/2012	3:07:54 PM	SiCl4 post valve closed
11/2/2012	3:07:54 PM	Main Vac valve closed
11/2/2012	3:07:54 PM	Bypass valve closed
11/2/2012	3:07:54 PM	Bubbler valve closed
11/2/2012	3:07:54 PM	Helium MFC set to  0.000000
11/2/2012	3:07:54 PM	H2 MFC set to  0.000000
11/2/2012	3:07:54 PM	BCl3 MFC set to  0.000000
11/2/2012	3:07:54 PM	PH3 MFC set to  0.000000
11/2/2012	3:07:54 PM	SiCl4 MFC set to  0.000000
11/2/2012	3:07:54 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	3:07:55 PM	Tube furnace set to 0
11/2/2012	3:07:58 PM	Helium valve closed
11/2/2012	3:07:58 PM	BCl3 valve closed
11/2/2012	3:07:58 PM	PH3 valve closed
11/2/2012	3:07:58 PM	SiCl4 pre valve closed
11/2/2012	3:07:58 PM	SiCl4 post valve closed
11/2/2012	3:07:58 PM	Main Vac valve closed
11/2/2012	3:07:58 PM	Bypass valve closed
11/2/2012	3:07:58 PM	Bubbler valve closed
11/2/2012	3:07:58 PM	H2 valve opened
11/2/2012	3:07:58 PM	Helium MFC set to  0.000000
11/2/2012	3:07:58 PM	H2 MFC set to  500.000000
11/2/2012	3:07:58 PM	BCl3 MFC set to  0.000000
11/2/2012	3:07:58 PM	PH3 MFC set to  0.000000
11/2/2012	3:07:58 PM	SiCl4 MFC set to  0.000000
11/2/2012	3:07:58 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	3:07:58 PM	Tube furnace set to 0
11/2/2012	3:09:15 PM	Helium valve closed
11/2/2012	3:09:15 PM	BCl3 valve closed
11/2/2012	3:09:15 PM	PH3 valve closed
11/2/2012	3:09:15 PM	SiCl4 pre valve closed
11/2/2012	3:09:15 PM	SiCl4 post valve closed
11/2/2012	3:09:15 PM	Main Vac valve closed
11/2/2012	3:09:15 PM	Bypass valve closed
11/2/2012	3:09:15 PM	H2 valve opened
11/2/2012	3:09:15 PM	Bubbler valve opened
11/2/2012	3:09:15 PM	Helium MFC set to  0.000000
11/2/2012	3:09:15 PM	H2 MFC set to  500.000000
11/2/2012	3:09:15 PM	BCl3 MFC set to  0.000000
11/2/2012	3:09:15 PM	PH3 MFC set to  0.000000
11/2/2012	3:09:15 PM	SiCl4 MFC set to  0.000000
11/2/2012	3:09:15 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	3:09:15 PM	Tube furnace set to 0
11/2/2012	3:09:16 PM	Helium valve closed
11/2/2012	3:09:16 PM	BCl3 valve closed
11/2/2012	3:09:16 PM	PH3 valve closed
11/2/2012	3:09:16 PM	SiCl4 pre valve closed
11/2/2012	3:09:16 PM	SiCl4 post valve closed
11/2/2012	3:09:16 PM	Main Vac valve closed
11/2/2012	3:09:16 PM	Bypass valve closed
11/2/2012	3:09:16 PM	H2 valve opened
11/2/2012	3:09:16 PM	Bubbler valve opened
11/2/2012	3:09:16 PM	Helium MFC set to  0.000000
11/2/2012	3:09:16 PM	H2 MFC set to  500.000000
11/2/2012	3:09:16 PM	BCl3 MFC set to  0.000000
11/2/2012	3:09:16 PM	PH3 MFC set to  0.000000
11/2/2012	3:09:16 PM	SiCl4 MFC set to  0.000000
11/2/2012	3:09:16 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	3:09:16 PM	Tube furnace set to 1000
11/2/2012	3:29:17 PM	Helium valve closed
11/2/2012	3:29:17 PM	PH3 valve closed
11/2/2012	3:29:17 PM	Main Vac valve closed
11/2/2012	3:29:17 PM	Bypass valve closed
11/2/2012	3:29:17 PM	H2 valve opened
11/2/2012	3:29:17 PM	BCl3 valve opened
11/2/2012	3:29:17 PM	SiCl4 pre valve opened
11/2/2012	3:29:17 PM	SiCl4 post valve opened
11/2/2012	3:29:17 PM	Bubbler valve opened
11/2/2012	3:29:17 PM	Helium MFC set to  0.000000
11/2/2012	3:29:17 PM	H2 MFC set to  450.000000
11/2/2012	3:29:17 PM	BCl3 MFC set to  1.300000
11/2/2012	3:29:17 PM	PH3 MFC set to  0.000000
11/2/2012	3:29:17 PM	SiCl4 MFC set to  50.000000
11/2/2012	3:29:17 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	3:29:17 PM	Tube furnace set to 1000
11/2/2012	3:29:17 PM	Helium valve closed
11/2/2012	3:29:17 PM	H2 valve closed
11/2/2012	3:29:17 PM	BCl3 valve closed
11/2/2012	3:29:17 PM	PH3 valve closed
11/2/2012	3:29:17 PM	SiCl4 pre valve closed
11/2/2012	3:29:17 PM	SiCl4 post valve closed
11/2/2012	3:29:17 PM	Main Vac valve closed
11/2/2012	3:29:17 PM	Bubbler valve closed
11/2/2012	3:29:17 PM	Bypass valve closed
11/2/2012	3:29:17 PM	Helium MFC set to  0.000000
11/2/2012	3:29:17 PM	H2 MFC set to  0.000000
11/2/2012	3:29:17 PM	BCl3 MFC set to  0.000000
11/2/2012	3:29:17 PM	PH3 MFC set to  0.000000
11/2/2012	3:29:17 PM	SiCl4 MFC set to  0.000000
11/2/2012	3:29:17 PM	Bypass solenoid MFC set to  760.000000
11/2/2012	3:29:17 PM	Tube furnace set to 0
11/2/2012	3:29:17 PM	Baratron reads 508.569533 Torr and NaOH valve is open.  Emergency exit.
11/2/2012	4:27:49 PM	Run aborted at 4:27 PM
11/2/2012	4:27:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/2/2012	4:27:56 PM	Recipe started at 4:27 PM
11/2/2012	4:27:56 PM	Helium valve closed
11/2/2012	4:27:56 PM	H2 valve closed
11/2/2012	4:27:56 PM	BCl3 valve closed
11/2/2012	4:27:56 PM	PH3 valve closed
11/2/2012	4:27:56 PM	SiCl4 pre valve closed
11/2/2012	4:27:56 PM	SiCl4 post valve closed
11/2/2012	4:27:56 PM	Main Vac valve closed
11/2/2012	4:27:56 PM	Bypass valve closed
11/2/2012	4:27:56 PM	Bubbler valve closed
11/2/2012	4:27:56 PM	Helium MFC set to  0.000000
11/2/2012	4:27:56 PM	H2 MFC set to  0.000000
11/2/2012	4:27:56 PM	BCl3 MFC set to  0.000000
11/2/2012	4:27:56 PM	PH3 MFC set to  0.000000
11/2/2012	4:27:56 PM	SiCl4 MFC set to  0.000000
11/2/2012	4:27:56 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	4:27:56 PM	Tube furnace set to 0
11/2/2012	4:27:59 PM	H2 valve closed
11/2/2012	4:27:59 PM	BCl3 valve closed
11/2/2012	4:27:59 PM	PH3 valve closed
11/2/2012	4:27:59 PM	SiCl4 pre valve closed
11/2/2012	4:27:59 PM	SiCl4 post valve closed
11/2/2012	4:27:59 PM	Main Vac valve closed
11/2/2012	4:27:59 PM	Bypass valve closed
11/2/2012	4:27:59 PM	Bubbler valve closed
11/2/2012	4:27:59 PM	Helium valve opened
11/2/2012	4:27:59 PM	Helium MFC set to  500.000000
11/2/2012	4:27:59 PM	H2 MFC set to  0.000000
11/2/2012	4:27:59 PM	BCl3 MFC set to  0.000000
11/2/2012	4:27:59 PM	PH3 MFC set to  0.000000
11/2/2012	4:27:59 PM	SiCl4 MFC set to  0.000000
11/2/2012	4:27:59 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	4:27:59 PM	Tube furnace set to 0
11/2/2012	4:28:26 PM	Helium valve closed
11/2/2012	4:28:26 PM	H2 valve closed
11/2/2012	4:28:26 PM	BCl3 valve closed
11/2/2012	4:28:26 PM	PH3 valve closed
11/2/2012	4:28:26 PM	SiCl4 pre valve closed
11/2/2012	4:28:26 PM	SiCl4 post valve closed
11/2/2012	4:28:26 PM	Main Vac valve closed
11/2/2012	4:28:26 PM	Bypass valve closed
11/2/2012	4:28:26 PM	Bubbler valve closed
11/2/2012	4:28:26 PM	Helium MFC set to  0.000000
11/2/2012	4:28:26 PM	H2 MFC set to  0.000000
11/2/2012	4:28:26 PM	BCl3 MFC set to  0.000000
11/2/2012	4:28:26 PM	PH3 MFC set to  0.000000
11/2/2012	4:28:26 PM	SiCl4 MFC set to  0.000000
11/2/2012	4:28:26 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	4:28:26 PM	Tube furnace set to 0
11/2/2012	4:28:27 PM	Run finished at 4:28 PM
11/2/2012	4:28:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/2/2012	4:39:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2012	4:39:45 PM	Recipe started at 4:39 PM
11/2/2012	4:39:45 PM	Helium valve closed
11/2/2012	4:39:45 PM	H2 valve closed
11/2/2012	4:39:45 PM	BCl3 valve closed
11/2/2012	4:39:45 PM	PH3 valve closed
11/2/2012	4:39:45 PM	SiCl4 pre valve closed
11/2/2012	4:39:45 PM	SiCl4 post valve closed
11/2/2012	4:39:45 PM	Main Vac valve closed
11/2/2012	4:39:45 PM	Bubbler valve closed
11/2/2012	4:39:45 PM	Bypass valve opened
11/2/2012	4:39:45 PM	Helium MFC set to  0.000000
11/2/2012	4:39:45 PM	H2 MFC set to  0.000000
11/2/2012	4:39:45 PM	BCl3 MFC set to  0.000000
11/2/2012	4:39:45 PM	PH3 MFC set to  0.000000
11/2/2012	4:39:45 PM	SiCl4 MFC set to  0.000000
11/2/2012	4:39:45 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	4:39:45 PM	Tube furnace set to 0
11/2/2012	4:41:07 PM	Helium valve closed
11/2/2012	4:41:07 PM	H2 valve closed
11/2/2012	4:41:07 PM	BCl3 valve closed
11/2/2012	4:41:07 PM	PH3 valve closed
11/2/2012	4:41:07 PM	SiCl4 pre valve closed
11/2/2012	4:41:07 PM	SiCl4 post valve closed
11/2/2012	4:41:07 PM	Main Vac valve closed
11/2/2012	4:41:07 PM	Bubbler valve closed
11/2/2012	4:41:07 PM	Bypass valve opened
11/2/2012	4:41:07 PM	Helium MFC set to  0.000000
11/2/2012	4:41:07 PM	H2 MFC set to  0.000000
11/2/2012	4:41:07 PM	BCl3 MFC set to  0.000000
11/2/2012	4:41:07 PM	PH3 MFC set to  0.000000
11/2/2012	4:41:07 PM	SiCl4 MFC set to  0.000000
11/2/2012	4:41:07 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	4:41:07 PM	Tube furnace set to 0
11/2/2012	4:42:07 PM	Helium valve closed
11/2/2012	4:42:07 PM	H2 valve closed
11/2/2012	4:42:07 PM	BCl3 valve closed
11/2/2012	4:42:07 PM	PH3 valve closed
11/2/2012	4:42:07 PM	SiCl4 pre valve closed
11/2/2012	4:42:07 PM	SiCl4 post valve closed
11/2/2012	4:42:07 PM	Bypass valve closed
11/2/2012	4:42:07 PM	Bubbler valve closed
11/2/2012	4:42:07 PM	Main Vac valve opened
11/2/2012	4:42:07 PM	Helium MFC set to  0.000000
11/2/2012	4:42:07 PM	H2 MFC set to  0.000000
11/2/2012	4:42:07 PM	BCl3 MFC set to  0.000000
11/2/2012	4:42:07 PM	PH3 MFC set to  0.000000
11/2/2012	4:42:07 PM	SiCl4 MFC set to  0.000000
11/2/2012	4:42:07 PM	Bypass solenoid MFC set to  0.000000
11/2/2012	4:42:07 PM	Tube furnace set to 0
11/2/2012	4:42:08 PM	Run finished at 4:42 PM
11/2/2012	4:42:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
